Rapid Thermal Processing:Science and Technology

电子技术

原   价:
756.25
售   价:
605.00
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平台大促 低至8折优惠
发货周期:预计4-6周发货
作      者
出  版 社
出版时间
1993年04月01日
装      帧
精装
ISBN
9780122476907
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页      码
430
开      本
9.31 x 6.31 x 0.97
语      种
英文
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图书简介
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussion
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