Microengineering, MEMS, and Interfacing:A Practical Guide

微型工程、微机电系统与界面:实用指南

机械史

原   价:
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发货周期:预计5-7周发货
作      者
出  版 社
出版时间
2019年08月30日
装      帧
平装
ISBN
9780367391027
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页      码
352
开      本
6 x 9
语      种
英文
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图书简介
Designed to address particular problems across a range of disciplines, Microengineering, MEMS, and Interfacing: A Practical Guide provides a general overview of micromachining techniques and presents micromachining approaches to problem solving. The author outlines techniques for micromachining materials, including silicon, metals, and polymers, and then illustrates how to combine these technologies to create a variety of structures and devices. He also includes discussions on nanotechnology and how it overlaps with microengineering, introduces the subject of sensor interfacing, and raises the tricky subject of MEMS packaging.
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