Spectroscopic Ellipsometry - Principles and Applications

椭圆光度法:原理与应用

仪器仪表技术

售   价:
1767.00
作      者
出  版 社
出版时间
2007年01月26日
装      帧
精装
ISBN
9780470016084
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页      码
392
语      种
英文
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图书简介
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the la
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Yale University Library
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