Microwave Excited Plasmas

人工智能

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605.00
发货周期:预计4-6周发货
作      者
出  版 社
出版时间
1992年11月01日
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精装
ISBN
9780444888150
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开      本
语      种
英文
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图书简介
The contrasting examples of microwave plasmas given in this volume demonstrate their capability of not only covering the totality of expressed needs in that particular field, but in many others. For example the ions and reactive neutral species, indispensable for the synergetic effects in etching and deposition processes can be used in metallurgical treatment, and for materials processing in general. They also have the ability to dissociate molecules and excite atoms as required in analytical chemistry where the information on the
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