LOW ENERGY ION ASSISTED FILM GROWTH

应用物理学

原   价:
1242.00
售   价:
931.00
发货周期:预计3-5周发货
作      者
出  版 社
出版时间
2003年03月25日
装      帧
精装
ISBN
9781860943515
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页      码
300
语      种
英文
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库存 30 本
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图书简介
This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are
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