Integrated Nanodevice and Nanosystem Fabrication:Breakthroughs and Alternatives(Pan Stanford Series on Intelligent Nanosystems)

集成纳米器件与纳米系统制造:突破与替代方案

物理学史

售   价:
1522.00
发货周期:预计5-7周发货
作      者
出  版 社
出版时间
2017年11月14日
装      帧
精装
ISBN
9789814774222
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页      码
400
开      本
6x9
语      种
英文
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图书简介
Integrated Nanodevice and Nanosystem Fabrication: Breakthroughs and Alternatives is the second volume in the Pan Stanford Series on Intelligent Nanosystems. The book contains 8 chapters and is divided into two parts, the first of which reports breakthrough materials and techniques such as single ion implantation in silicon and diamond, graphene and 2D materials, nanofabrication using scanning probe microscopes, while the second tackles the scaling and architectural aspects of silicon devices through HiK scaling for nanoCMOS, nanoscale epitaxial growth of group IV semiconductors, design for variability co-optimization in SOI FinFETs, and nanowires for CMOS and diversifications.
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